Overview

Products

Equipment

Fully automated

Our fully automated product line features high throughput. This enables customers around the world to make their specialty products competitive and ready for mass production.

BATCHSPRAY® Acid Autoload

BATCHSPRAY® Clean Autoload

BATCHSPRAY® Solvent Autoload

BATCHSPRAY® Acid/Solvent Autoload

BATCHSPRAY® Acid/Clean Autoload

Equipment

Semi automated

Our semi-automated equipment stands out for its high performance, efficient chemical recirculation, and a minimal footprint, optimizing space efficiency.

BATCHSPRAY® Solvent

BATCHSPRAY® Acid

Features

Retainer Comb Handling

DIW Spiking

End point detection

Siconnex

Product standards

Our standardised products are optimised using pre-defined options upon customer request. We select the best raw materials and parts and guarantee the fastest possible production. The main product focus is to harmonise international standards with our high quality demands.

Standards guarantee

U.S. Standard
CE Standard
ISO9001
SECS/GEM & GEM300
SEMI S2/S8
BATCHSPRAY® Technology

DNA of our equipment

BATCHSPRAY®, our core technology of all our equipment, offers efficient chemical-based cleaning, etching, rinsing, and drying within a versatile process chamber. It accommodates one carrier with 25 wafers or two carriers with 50 wafers and can run up to four chambers simultaneously, achieving throughputs of 400 wafers per hour.

BATCHSPRAY® Technology