Sustainability for semiconductor industry

Green goals. Yellow solutions.

In today’s industrial landscape, sustainability has become a top priority across various sectors, including semiconductor manufacturing. Companies are increasingly focused on conserving resources and optimizing the use of costly chemicals. Siconnex, a forward-thinking company, foresaw this need for sustainability over two decades ago when it introduced its innovative BATCHSPRAY® technology. With its „yellow solutions“, Siconnex is transforming the industry towards greener production.

Reduce environmental impact of semiconductor manufacturing

Decrease chemical consumption

 

Save huge amount of water

 

Reduce harmful exhaust gases

 

Save energy

 

Comparison

BATCHSPRAY® vs. wet bench

Batch spraying emerges as the greener choice, conserving chemicals and water, while reducing waste, and contributing to environmental preservation.

Savings

Equipment

Reduction of footprint
%
Reduction of electricity
%
Reduction of exhaust consumption
%
Reduction of process media
%

Compared to conventional wet benches

Savings

perc™ application

Reduction of waste treatment
%
Reduction of Chemical Consumption
%

Compared to conventional cleaning systems

perc™ application
Savings

SicOzone application

Reduction of chemical consumption
%
Reduction of waste treatment
%

Compared to conventional wet benches

sicOzone application
Company

Sustainable corporate initiatives

Car fleet

Green commuting excellence

Our electric cars facilitate sustainable commuting between the Hof and Thalgau locations. This eco-friendly initiative underscores our commitment to sustainable mobility, contributing to a reduction in CO2 emissions on the commuting route.

Energy

Renewable energy commitment

We use 100% of renewable energy, primarily sourced from hydropower, for both production and administration, exemplifying our commitment to sustainability and environmental responsibility.

Local sourcing

Focus on local materials and parts

We source our parts and materials from the local vicinity, eliminating unnecessary transportation, and reducing CO2 emissions — a commitment to environmental responsibility in our production practices.

Green developments

Application

SicOzone

SicOzone stands out in the industry with its peerless efficiency in clean and strip applications. Its uniqueness lies in its high efficacy, making it a standout choice to bring sustainability in semiconductor industry.

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Application

PERC™

percTM enables simple and flexible polymer removal. Due to its unique process flexibility its used to remove any kind of polymer residues after dry etching processes like metal-, oxide-, silicon- or VIA etching.

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Technology

BATCHSPRAY®

Our core technology is used in all our equipment and provides efficient chemical-based cleaning, etching, rinsing, and drying within a versatile process chamber. It can operate up to four chambers simultaneously, delivering throughputs of up to 600 wafers per hour.

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