Features and benefits of the retainer comb handling system
Our Retainer Comb Handling System is designed to be fully compatible with all Siconnex equipment, providing you with a comprehensive and integrated solution for your wafer processing needs.
Versatility is key in wafer processing, and our equipment delivers just that. Whether you need to process 50 wafer 8” or 25 wafer 12”, our equipment is fully suitable for both scenarios.
With our advanced 25 wafer handler transfer, you can experience a significant boost in efficiency, as entire batches are completed in one step. This revolutionary capability streamlines your production process, saving valuable time and resources.
Maintaining a pulse on your wafer processing progress is vital for efficient operations. With built-in Wafer detection on the handler and at the wafer station, you can achieve continuous tracking and real-time insights into your production status.
The incorporation of a maximum opening area in our equipment is a proof to our commitment to achieve superior results. By ensuring optimal chemistry exchange on the wafer surface, we guarantee precision and consistency in each processing step.
When it comes to ensuring consistent conditions throughout your batch, we offer a thoughtful solution. You have the option of compressing and/or shielding the batch with protective wafers, both at the front and rear ends, guaranteeing uniformity in every wafer’s treatment.
Optional automation features
For enhanced wafer handling efficiency, we offer dedicated handlers specifically designed for dirty in/clean out processes. These specialized handlers ensure optimal cleanliness and prevent cross-contamination, maintaining the highest standards of wafer integrity.
To capture your unique process requirements, our equipment includes dedicated handlers for both left and right process chambers. This tailored approach maximizes workflow flexibility, enabling seamless integration into your existing setup for improved productivity and convenience.
Increase your throughput
The Retainer Comb Handling (RCH) system combines optimum process performance, high throughput and simple design for all Siconnex Autoload Equipment.
*Compared to conventional processes without Retainer Comb Handling System
Impressive advantages with the patented development from Siconnex
The Retainer Comb Handling system lifts the whole batch at once including front and rear protective wafers. This means a batch of 27 12“ wafers or 52 8“ wafers can be handled simultaneously. To ensure the highest-possible process output, the batch is compressed with a single wafer handler to eliminate empty slots before the process starts. During the process, the Retainer Comb Handling system prepares the next batch on the wafer station for continuous processing. A significant advantage Retainer Comb Handling system‘s patented technology is that the same process conditions for temperature, flow and chemical exchange are guaranteed for every wafer, thanks to the large opening area.
BATCHSPRAY® Autoload
